Gas RF Plasma Asher Etcher, MetroLine TePla M4L Ulvac DVS-321 Vacuum Pump (9212)

• Manufacturer: PVA TePla | Metroline
• Model #/ Model: M4L

Includes

• Metroline M4L Plasma Asher 2 Gas Cage
• Ulvac DVS-321 Vacuum Scroll Pump
• Metroline M4L Operation and Maintenance Manual
• Extra Door Gasket
• Bellows Hose w/ Clamps
• Spare Fuses
• x2 Air Regulators
• Computer Mouse
• Software (Installed+CD): PVA Tepla American M4L (OS: Windows 2000)
• 120 V 60 Hz 23 Amp Single Phase 3 Wire
• Options Included:
  • Throttle Valve
  • 2 Gas
  • Cage

Specifications: (These specifications were taken from an online user manual and may not be accurate to this product.)
 

M4L Plasma Asher

• Chamber: 9x13x20"
• RF Generator: 600 Watt 13.56 MHz air cooled with automatic impedance matching network.
• Display: Color 10.4 in touch screen for control and monitoring or process parameters, automatic recipes, or manual plasma treatments.
• Two user specified gases, with 500 sccm MFCs standard.

Ulvac DVS-321 Vacuum Scroll Pump

• Pumping Speed (L/min): 265/320 (50/60Hz)
• Ultimate Pressure(Pa): 1.5
• Motor: Single Phase 100/114/200/230V, 4000W, 4P
• Full load current (A):
  • 50Hz 5.3/2.9/3.0 (100/200/230V)
  • 60Hz 4.6/4.1/2.5/2.3 (100/115/200/230V)
• Inlet, outlet pipe diameter: IN KF25 Out KF16
• Ambient Operation temp. range C: 5~35
• Max. water vapor tolerance (g/hr):
• Noise (at a distance of 1m) dB:
• Plasma surface modification
• Plasma cleaning of organic surfaces
• Bond strength enhancement
• Plasma etch applications
• Plasma asher applications
• Increased or decreased wettability
• Any other plasma system application

Dimensions

• Actual Dimensions (M4L): 28x38x32"
• Total Actual Weight: 500 lbs 
• Shipping Dimensions: ~41x48x45"
• Shipping Weight:  ~860 lbs

Crating Fee: Ask for a Quote
Sold as is with 30 day Right of Return, only pictured items included
Easy return/refund for any reason
Anacapa Equipment

RETURNS 
Anacapa Equipment Brokers, Inc. (“Seller”) strives to offer excellent customer service.   You may return any equipment purchased from us for any reason within thirty (30) days after your receipt of the equipment for a full refund of the purchase price, provided that returned items are received in the same condition as sent.  We DO NOT ship internationally.  If you are using a freight forwarder then returns are VOID.  
SHIPPING                                                                                                               All equipment purchased is shipped within one (1) business day (subject to freight availability) after receipt of payment and is shipped FOB place of shipment.  We only charge actual shipping cost.  If eBay overcharges for shipping, we issue an immediate refund for the difference. If you are undercharged, we will absorb the cost. We DO NOT ship internationally.  IF you are using a freight forwarder then returns are VOID.  
LIMITED WARRANTY                                                                 
Buyer acknowledges that the equipment is being sold “as is" and without any warranty of merchantability or fitness for a particular use.  The entire risk as to the quality and performance of the equipment is with the Buyer.  Should the equipment prove defective following its purchase the Buyer and not the Seller, manufacturer, distributor, or retailer assumes the entire cost of all necessary servicing or repair.  Buyer may inspect the equipment prior to purchase and placement of the order.  Failure to inspect prior to placement of an order is deemed a waiver of Buyer’s right to inspect.  Buyer is responsible for determining the suitability of the equipment for its application.  Seller assumes no liability for the use or misuse of any equipment purchased by Buyer. It is assumed that the equipment will be installed and operated by qualified personnel. The Buyer agrees that the Seller shall not be held responsible or liable for any injuries or damages, whether incidental or consequential, associated in any way with the equipment purchased.  The Buyer, by purchasing this equipment, indicates its acknowledgment of, and agreement, to the terms of this limited warranty.
INDEMNITY                                                                                                            
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