Matrix System One 105E Plasma Asher / Stripper / Descum 2 Units (1 for parts)
Condition Details: Includes as pictured. SELLING 2 UNITS, one FULLY FUNCTIONAL, one has a problem with the magnetic card reader for the recipes so we are selling as parts machine for other unit.
Matrix System One Stripper 105 E Plasma Etcher / Asher, 2 Units, One for Parts, One Used. Includes as pictured. SELLING 2 UNITS, one FULLY FUNCTIONAL, one has a problem with the magnetic card reader for the recipes so we are selling as parts machine for other unit but we have ordered the reader, will install and test it. Working unit removed from working environment
The Matrix 105 Plasma Asher uses oxygen, plasma, and heat to remove photoresist on silicon, GaAs and other substrates. It can also be used to removed photoresist residue after development (descum). The Matrix 105 can process up to 6" wafers, or pieces of wafers using special fixtures.
Single wafer, single cassette, robotic asher and etcher
Menu-driven microprocessor / controller
Multi-step programming (three steps + over etch)
Wafer pin lift assembly (up/down)
Two mass flow controllers
Wafer size range: 3-6 inch / 75-150 mm
RF power supply: 600W, 13.56MHz, water-cooled, RF generator model ENI OEM-6 XL (OEM-6M-01), & RF Generator OEM-6B
Ash/Strip temperature range: 70-250°C
Descum temperature range: 70-150°C
Recipe cards included
Both Quartz Chambers are intact
Both have Wafer Chucks Installed
Counters Read: 193,697 & 412,154
AC Power Distribution Model: 101-0448 (Two of these)
DC Power Distribution Models: 101-1124 & 101-0952
Temperature / Pressure Control Model: 101-0243 (Two of these)
200-240V, 1 Phase, 50/60 Hz 2500 Volt-Amps
Crating cost: $200
Sold as is with 30 day Right of Return, only pictured items included
Easy return/refund for any reason
Anacapa Equipment strives to offer excellent customer service. You may return any equipment purchased from us for any reason within thirty (30) days after your receipt of the equipment for a full refund of the purchase price, provided that returned items must be received in the same condition as sent.
All equipment purchased is shipped within one (1) day (subject to freight availability) after receipt of payment and is shipped FOB place of shipment. We only charge actual shipping cost. If eBay overcharges for shipping, we issue an immediate refund for the difference. If you are undercharged, we will absorb the cost.
Buyer acknowledges that the equipment is being sold “as is" and without any warranty of merchantability or fitness for a particular use. Buyer may inspect the equipment prior to purchase and placement of the order prior to inspection is deemed a waiver of Buyer’s right to inspect. Buyer is responsible for determining the suitability of this product for its application. Anacapa Equipment Brokers, Inc. assumes no liability for the use or misuse of any equipment purchased by Buyer. It is assumed that the unit will be installed and operated by qualified personnel. The purchaser agrees that the seller shall not be held responsible or liable for any injuries or damages, whether incidental or consequential, associated in any way with the equipment purchased. The Buyer, by purchasing this equipment, indicates its acknowledgment of, and agreement, to the terms of this limited warranty.
This equipment is not intended to be used, and should not be used in human experimentation, nor should this instrument be applied to humans in any way.