Edwards EPX 500NE EPX500NE All-In-One Atmosphre-to-HiVac Dry Vacuum Turbo Pump
Still in box after Edwards manufacturer full rebuild. See QA Test Certificate for services and results. The first six pictures are from manufacturer's website.
The following is from the manufacturer's website:
Edwards EPX 500NE High Vacuum DryPump.
Edwards Part Number: A41954012
The new compact EPX500 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX500 is capable of pumping from atmosphere to ultimate pressures of <7 x 10-5 Torr. These are truly amazing pumps; the Edwards EPX pump can pump down from atmosphere to the turbo molecular pressure range and can operate continuously at all inlet pressures. The EPX NE series of pumps has an End User Controller (EUC). The End User Controller enables local control for stand-alone use as well as the ability to connect to a fab-wide network for remote control and monitoring. The EPX pump system operates at pressures between atmospheric and ultimate vacuum, with no lubricating or sealing fluid in the pumping chamber. This ensures a clean pumping system without back-migration of oil or fluid into the system being evacuated.
The stator of the pump and the enclosed motor are cooled by an integrated water cooling circuit. The EPX pump is therefore suitable for applications in cleanroom environments where fan cooling is unacceptable. The cooling water supply and return pipelines are connected to the pump by water connectors (customer specified). Cooling water must commensurate with the environmental conditions (humidity and temperature) such that the dewpoint is not reached. The pump incorporates an EMC supply filter and an inverter drive, which provides and controls the electrical supply to the pump-motor. LEDs on the front cover identify the status of the EPX pump. Motor speed depends on the pressure at the pump inlet. When the pump is started with the inlet pressure at or close to atmospheric pressure, the motor accelerates to a speed which is limited by the current which can be supplied by the inverter drive. As the pressure at the inlet is reduced, the motor speed increases, until it eventually reaches its preset maximum speed. If the pressure at the inlet increases, the motor will slow down again.
The EPX NE series of pumps can be manually operated using the End User Control (EUC) local display and keypad, or remotely using a Pump Display Terminal (PDT), NOT INCLUDED; it can also be controlled and monitored over the network, which connects to the EPX pump through the Network connector. The EPX pump is compatible with Fabworks 32. The EPX pump is supported by four vibration isolators. Pump protection sensors automatically shut down the pump if a fault condition arises. The EPX series covers a broad range of applications from wafer handling through to medium duty processes. The EPX ‘N’ Series include a gas module that provides Nitrogen purge extending the application range to medium processes in which low levels of corrosive vapors and articulates are expected.
- Process Compatibility Applications for EPX 500NE Include:
- Load Lock
- Transfer Chamber
- PVD Sputtering
- Ashing/PR Strip
- Dieletric Etch
Features and Benefits Include:
- Compact Footprint – Smallest in the industry.
- Low Cost of Ownership – Only 1.4 kW of power.
- Unique Patent Protected Pumping Mechanism – Pump down at atmosphere to turbomolecular base pressure and can operate continuously at all inlet pressures.
- Ultra Clean Mechanism – No grease or oil lubricated bearings exposed to high vacuum that allows no other source of potential contamination.
- Extremely Reliable – Has a MTBFp = 13 years (SEMI E10) with service periods of around every 5 years to maximize the life of the pump.
Sold as is with 30 day Right of Return, only pictured items included
Please call 805.680.7222 for easy return/refund for any reason
Anacapa Equipment strives to offer excellent customer service. You may return any equipment purchased from us for any reason within thirty (30) days after your receipt of the equipment for a full refund of the purchase price, provided that returned items must be received in the same condition as sent.
All equipment purchased is shipped within one (1) day (subject to freight availability) after receipt of payment and is shipped FOB place of shipment. We only charge actual shipping cost. If eBay overcharges for shipping, we issue an immediate refund for the difference. If you are undercharged, we will absorb the cost.
Buyer acknowledges that the equipment is being sold “as is” and without any warranty of merchantability or fitness for a particular use. Buyer may inspect the equipment prior to purchase and placement of the order prior to inspection is deemed a waiver of Buyer’s right to inspect. Buyer is responsible for determining the suitability of this product for its application. Anacapa Equipment Brokers, Inc. assumes no liability for the use or misuse of any equipment purchased by Buyer. It is assumed that the unit will be installed and operated by qualified personnel. The purchaser agrees that the seller shall not be held responsible or liable for any injuries or damages, whether incidental or consequential, associated in any way with the equipment purchased. The Buyer, by purchasing this equipment, indicates its acknowledgment of, and agreement, to the terms of this limited warranty.