Very low hour system. Used 3 months for R&D not for production. Includes many accessories. Model: 141020-0002 Jet, 115VAC, 50/60Hz, 1 Phase Robot: 164296-0001 164-262-2400 M-Phase T1: 113W Upper:156 Z: 280W Lower T2: 157 Two Brooks Wafer Loaders: 450 Vision 176334-04-BX Foups: 2 used: Entegris 450mm H-mac, 450mm Foup 1 unused Entegris 10118 450 mm Controller Cables, Cords Cassettes X 3 450mm DIP Switch TLS-12B-7O00-T1-00E1 Unused FRU End Effector Single Razor Brooks Hardware w OS 163497 Hardware 161502 Fusion V 220.127.116.11 183932
Brooks 182131 (Aligner?) Aerobar 5225, Filters Dimensions: 75" X 62" X 87" WDH (uncrated)
Payment by Check or wire transfer only.
The following taken from manufacturer's website:
Brooks consistently delivers the high performance, ultra-cleanliness and proven reliability required for semiconductor wafer processing and other complex manufacturing environments. Our EFEMs are thoroughly tested under the most rigorous fab conditions to ensure industry-leading interoperability with manufacturers’ equipment and processes.
In addition, our atmospheric systems feature high configurability and a wide selection of off-the-shelf options, making them readily adaptable to meet application-specific needs and keep pace with rapidly evolving industry requirements.
Jet, the core atmospheric automation subsystem for all Brooks wafer handling systems, is the first EFEM designed at the system level, enabling customers to build process tools around a common core. Jet features a flexible, modular architecture based on industry standards to enable fast set-up, reduced cycle times, and seamless integration with existing fab equipment and processes. The Brooks Jet family delivers the high-performance ultra-cleanliness and proven reliability that today’s semiconductor manufacturers expect and demand.
Take off with a revolutionary approach to semiconductor wafer handling.
Crate-to-Operate™ in less than one hour for fast, easy set-up and integration
Kinematic mounting system with one-time height and level adjustment
Brooks patented direct drive technology and motion control expertise
End-of-line configurable options
Uniform set of spare for easy part swapping across multiple tools