Brooks Automation Wafer Handling Jet Atmospheric Transport 450mm, 2 Wafer Load
Brooks Automation Wafer Handling Jet Atmospheric Transport 450mm, 2 Wafer Load
Brooks Automation Wafer Handling Jet Atmospheric Transport 450mm, 2 Wafer Load
Brooks Automation Wafer Handling Jet Atmospheric Transport 450mm, 2 Wafer Load
Brooks Automation Wafer Handling Jet Atmospheric Transport 450mm, 2 Wafer Load

Brooks Automation Wafer Handling Jet Atmospheric Transport 450mm, 2 Wafer Load

Regular price $ 29,000.00 Sale

Very low hour system.  Used 3 months for R&D not for production.  Includes many accessories.
Model: 141020-0002 Jet, 115VAC, 50/60Hz, 1 Phase
Robot: 164296-0001 164-262-2400 M-Phase
            T1: 113W Upper:156
            Z:   280W Lower
            T2: 157
Two Brooks Wafer Loaders:  450 Vision 176334-04-BX
Foups: 2 used: Entegris 450mm H-mac, 450mm Foup
            1 unused Entegris 10118 450 mm
Controller
Cables, Cords
Cassettes X 3 450mm
DIP Switch TLS-12B-7O00-T1-00E1
Unused FRU End Effector Single Razor
Brooks Hardware w OS 163497
             Hardware 161502
             Fusion V 1.5.2.2 183932
Brooks 182131 (Aligner?)
Aerobar 5225, Filters
Dimensions: 75" X 62"  X 87" WDH (uncrated)
Payment by Check or wire transfer only.  
The following taken from manufacturer's website:

Brooks consistently delivers the high performance, ultra-cleanliness and proven reliability required for semiconductor wafer processing and other complex manufacturing environments. Our EFEMs are thoroughly tested under the most rigorous fab conditions to ensure industry-leading interoperability with manufacturers’ equipment and processes.

In addition, our atmospheric systems feature high configurability and a wide selection of off-the-shelf options, making them readily adaptable to meet application-specific needs and keep pace with rapidly evolving industry requirements.

 

Jet, the core atmospheric automation subsystem for all Brooks wafer handling systems, is the first EFEM designed at the system level, enabling customers to build process tools around a common core. Jet features a flexible, modular architecture based on industry standards to enable fast set-up, reduced cycle times, and seamless integration with existing fab equipment and processes. The Brooks Jet family delivers the high-performance ultra-cleanliness and proven reliability that today’s semiconductor manufacturers expect and demand.

Take off with a revolutionary approach to semiconductor wafer handling.

Key Features

  • Crate-to-Operate™ in less than one hour for fast, easy set-up and integration
  • Kinematic mounting system with one-time height and level adjustment
  • Brooks patented direct drive technology and motion control expertise
  • End-of-line configurable options
  • Uniform set of spare for easy part swapping across multiple tools